ISO/WD 25827

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for determining physical film thickness by confocal laser scanning microscope

Апстракт

This international standard specifies a test method for determining physical film thickness by confocal laser scanning microscope. The method is one of non-destructive film thickness measurement methods and applicable for thin films or coatings with optical absorption in wavelength range of the laser emission. Contrary, it is difficult to apply this method for thin films or coatings that are transparent in wavelength range of the laser emission.