ISO/PWI 26721

Fine ceramics (advanced ceramics, advanced technical ceramics) --Test method for determining film thickness by infrared spectroscopy

Апстракт

This paper presents two non-destructive optical methods for determining the thickness of thin films by infrared spectroscopy. The interference fringe method is suitable for transparent films that produce periodic modulation in the infrared spectrum, while the characteristic absorption peak method is applicable to films with identifiable infrared absorption bands. These methods are widely used in industries such as semiconductors, optics, coatings, and polymers for quality control and process monitoring.