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IEC 63567-3 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

General information

30.60     Nov 14, 2025

IEC

TC 47

International Standard

31.080.99  

Life cycle

NOW

PROJECT
IEC 63567-3 ED1
30.60 Close of voting/ comment period
Nov 14, 2025