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ISO 18516:2006

Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution

Oct 19, 2006
95.99   Withdrawal of Standard   Jan 14, 2019

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95.99     Jan 14, 2019

ISO

ISO/TC 201/SC 2

International Standard

71.040.40  

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ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.
Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.

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NOW

WITHDRAWN
ISO 18516:2006
95.99 Withdrawal of Standard
Jan 14, 2019

REVISED BY

PUBLISHED
ISO 18516:2019