Withdrawn
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
WITHDRAWN
ISO 25178-604:2013
95.99
Withdrawal of Standard
Feb 14, 2025
PUBLISHED
ISO 25178-604:2025
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
95.99 Withdrawal of Standard