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ISO 14644-10:2013

Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration

Mar 1, 2013
95.99   Withdrawal of Standard   May 4, 2022

General information

95.99     May 4, 2022

ISO

ISO/TC 209

International Standard

13.040.35  

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Scope

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Life cycle

NOW

WITHDRAWN
ISO 14644-10:2013
95.99 Withdrawal of Standard
May 4, 2022

REVISED BY

PUBLISHED
ISO 14644-10:2022

National adoptions

SRPS EN ISO 14644-10:2013  
ISS

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

95.99   Withdrawal of Standard

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