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ISO 13424:2013

Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

Sep 23, 2013

General information

90.20     Apr 15, 2026

ISO

ISO/TC 201/SC 7

International Standard

71.040.40  

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Scope

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

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PUBLISHED
ISO 13424:2013
90.20 Standard under periodical review
Apr 15, 2026

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