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ISO 25178-603:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

Sep 25, 2013
95.99   Withdrawal of Standard   Feb 14, 2025

General information

95.99     Feb 14, 2025

ISO

ISO/TC 213

International Standard

17.040.20  

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Scope

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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ISO 25178-603:2013
95.99 Withdrawal of Standard
Feb 14, 2025

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ISO 25178-603:2025

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Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

95.99   Withdrawal of Standard

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