This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
PUBLISHED
ISO 25178-607:2019
PROJECT
ISO/DIS 25178-607
40.00
DIS registered
Aug 14, 2026
Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Design and characteristics of non-contact (confocal microscopy) instruments
10.99 New project approved