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ISO/TS 25138:2025

Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry

Feb 20, 2025

General information

60.60     Feb 20, 2025

ISO

ISO/TC 201/SC 8

Technical Specification

71.040.40  

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Scope

This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 5 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

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WITHDRAWN
ISO/TS 25138:2019

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PUBLISHED
ISO/TS 25138:2025
60.60 Standard published
Feb 20, 2025