ISO/CD 18115-4

Surface chemical analysis — Vocabulary — Part 4: Part 4: Terms used in Total Reflection X-ray Fluorescence (TXRF)

General information

Current stage: 30.20 Effective date: Apr 13, 2026

Originator: ISO

Owner: ISO/TC 201/SC 1

Type: International Standard

Scope

This International Standard defines terms for surface chemical analysis. Part four covers the terms related to the technique of total reflection x-ray fluorescence, extending the standard. ISO 18115-1 covers general terms and those used in spectroscopy, ISO 18115-2 terms used in scanning-probe microscopy and 18115-3 focuses on optical interface analysis including ellipsometry, Raman and nonlinear optical techniques.

Life cycle

NOW

PROJECT
ISO/CD 18115-4
30.20 CD study/ballot initiated
Apr 13, 2026

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