ISO/AWI 25835

Microbeam analysis — Analytical electron microscopy — Method for data acquisition and processing of three-dimensional electron diffraction

Scope

This document specifies the method for data acquisition and processing of three-dimensional electron diffraction using a transmission electron microscope (TEM) for determining the structures of nano-crystals.
It is applicable to nano-crystal specimens that are suitable for electron beam transmission, including organic, inorganic, and biological materials.
This document provides guidelines on instrument setup and calibration, specimen preparation, data acquisition, data processing and reporting of results for three-dimensional electron diffraction.
This document does not cover the determination of the space group or atomic positions (structure solution and refinement).