This document specifies the design and metrological characteristics of point autofocus probe (PAP) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
WITHDRAWN
SRPS EN ISO 25178-605:2015
PUBLISHED
SRPS EN ISO 25178-605:2025
60.60
Standard published
Apr 30, 2025