This document defines terms and specifies procedures for the characterization of mass spectrometer leak detectors (MSLD). This document is not intended to provide a complete set of specifications for acceptance testing, but rather a description of procedures that can be applied without specialized calibration equipment.
The methods described in this document are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions might be necessary.
These methods are applicable to commonly available MSLD, based on the present level of technology, which might be able to measure leakage rates down to 10−12 Pa⋅m3/s.
PUBLISHED
SRPS EN 1518:2011
PROJECT
dnaSRPS EN 1518:2023
50.20
Proof sent to secretariat or FDIS ballot initiated: 8 weeks
Jun 11, 2026
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