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prSRPS EN ISO 23131-3:2026

Ellipsometry — Part 3: Transparent single layer model

General information

10.99     Aug 20, 2026

ISS

C107

European Norm

English  

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Life cycle

NOW

PROJECT
prSRPS EN ISO 23131-3:2026
10.99 New project approved
Aug 20, 2026

Related project

Adopted from prEN ISO 23131-3 IDENTICAL

Adopted from ISO 23131-3:2026 IDENTICAL