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naSRPS EN ISO 23131-3:2026

Ellipsometry - Part 3: Transparent single layer model (ISO 23131-3:2026)

General information

40.10     Aug 28, 2026

40.20    Oct 29, 2026

ISS

C107

European Norm

17.020  

English  

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Life cycle

NOW

PROJECT
naSRPS EN ISO 23131-3:2026
40.10 harmonizedStageCodeLabel.40.10
Aug 28, 2026

Related project

Adopted from prEN ISO 23131-3 IDENTICAL

Adopted from ISO 23131-3:2026 IDENTICAL