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SRPS EN 62374-1:2013

Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers

Jan 28, 2013

General information

60.60     Jan 28, 2013

ISS

N022

European Norm

31.080  

English  

plan 2012.

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Scope

IEC 62374-1:2010 describes a test method, test structure and lifetime estimation method of the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied in semiconductor devices.

Life cycle

NOW

PUBLISHED
SRPS EN 62374-1:2013
60.60 Standard published
Jan 28, 2013

Related project

Adopted from EN 62374-1:2010

Adopted from EN 62374-1:2010/AC:2011