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Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
90.93
Standard confirmed
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
60.60
Standard published
Electricity metering - Data exchange for meter reading, tariff and load control - Glossary of terms - Part 1: Terms related to data exchange with metering equipment using DLMS/COSEM
60.60
Standard published
