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Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
90.93
Standard confirmed
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
60.60
Standard published
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
60.60
Standard published
Electricity metering - Data exchange for meter reading, tariff and load control - Glossary of terms - Part 1: Terms related to data exchange with metering equipment using DLMS/COSEM
60.60
Standard published
Corrigendum 1 - Electricity metering - Data exchange for meter reading, tariff and load control - Glossary of terms - Part 1: Terms related to data exchange with metering equipment using DLMS/COSEM
60.60
Standard published
Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment
60.60
Standard published
Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment
60.60
Standard published
Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment
60.60
Standard published
Electricity metering equipment (a.c.) - General requirements, tests and test conditions - Part 21: Tariff and load control equipment
60.60
Standard published
Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 21: Tariff and load control equipment
60.60
Standard published
Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 21: Tariff and load control equipment
60.60
Standard published
Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 31: Product safety requirements and tests
60.60
Standard published
Electricity metering equipment - General requirements, tests and test conditions - Part 31: Product safety requirements and tests
60.60
Standard published
