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ISO 14644-15:2017

Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

Oct 26, 2017
95.99   Withdrawal of Standard   May 12, 2026

General information

95.99     May 12, 2026

ISO

ISO/TC 209

International Standard

13.040.35  

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Scope

ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).
The following are outside the scope of ISO 14644-15:2017:
- health and safety requirements;
- compatibility with cleaning agents and techniques;
- cleanability;
- biocontamination;
- specific requirements of equipment and materials for processes and products;
- design details of equipment.

Life cycle

NOW

WITHDRAWN
ISO 14644-15:2017
95.99 Withdrawal of Standard
May 12, 2026

REVISED BY

PUBLISHED
ISO 14644-15:2026

National adoptions

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)

60.60   Standard published

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