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ISO 14644-15:2026

Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

May 12, 2026

General information

60.60     May 12, 2026

ISO

ISO/TC 209

International Standard

13.040.35  

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Scope

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).
This document does not apply to the following:

health and safety requirements;
compatibility with cleaning agents and techniques;
cleanability;
biocontamination;
specific requirements of equipment and materials for processes and products;
design details of equipment.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 14644-15:2017

NOW

PUBLISHED
ISO 14644-15:2026
60.60 Standard published
May 12, 2026

National adoptions

naSRPS EN ISO 14644-15:2025  
ISS

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2026)

40.60   Close of voting

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