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ISO 23420:2021

Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis

Apr 23, 2021

General information

90.20     Apr 15, 2026

ISO

ISO/TC 202/SC 3

International Standard

71.040.50  

English  

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Scope

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

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PUBLISHED
ISO 23420:2021
90.20 Standard under periodical review
Apr 15, 2026

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