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ISO 25164:2026

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Aug 3, 2026

General information

60.60     Aug 3, 2026

ISO

ISO/TC 107/SC 9

International Standard

25.220.40  

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Scope

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.

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PUBLISHED
ISO 25164:2026
60.60 Standard published
Aug 3, 2026