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ISO 25164

Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification

Опште информације

60.00     1. 7. 2026.

ISO

ISO/TC 107/SC 9

Međunarodni standard

25.220.40  

Apstrakt

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.

Životni ciklus

TRENUTNO

PROJEKAT
ISO 25164
60.00 Standard u postupku objavljivanja
1. 7. 2026.