Phone: (011) 7541-421, 3409-301, 3409-335, 6547-293, 3409-310
E-mail: Standards sales: prodaja@iss.rs Education: iss-edukacija@iss.rs Information about standards: infocentar@iss.rs
Stevana Brakusa 2, 11030 Beograd
Main menu

ISO/AWI 23131-4

Ellipsometry — Part 4: Semi-transparent single layer model

General information

20.00     Aug 19, 2026

ISO

ISO/TC 107

International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a semi-transparent layer and for the determination of the optical (refractive index n and extinction coefficient k) or dielectric (real part ε1 and imaginary part ε2) constants/functions based on the semi-transparent single layer model.

Life cycle

NOW

PROJECT
ISO/AWI 23131-4
20.00 New project registered in TC/SC work programme
Aug 19, 2026