20.00 Aug 19, 2026
ISO
ISO/TC 107
International Standard
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a semi-transparent layer and for the determination of the optical (refractive index n and extinction coefficient k) or dielectric (real part ε1 and imaginary part ε2) constants/functions based on the semi-transparent single layer model.
PROJECT
ISO/AWI 23131-4
20.00
New project registered in TC/SC work programme
Aug 19, 2026