0 Items
My account
Phone: (011) 7541-421, 3409-301, 3409-335, 6547-293, 3409-310
E-mail: Standards sales: prodaja@iss.rs Education: iss-edukacija@iss.rs Information about standards: infocentar@iss.rs
Stevana Brakusa 2, 11030 Beograd
Main menu

ISO/NP 26897

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating pixel size on digital image of SEM and FIB-SEM

General information

10.20     Jun 28, 2026

ISO

ISO/TC 202/SC 4

International Standard

Scope

This document specifies a method for calibrating the pixel size and FOV of digital images acquired using an SEM and an FIB-SEM, by employing an appropriate reference material. The applicable range of pixel size and FOV is limited by the structural dimensions available in the reference material used for calibration.

Life cycle

NOW

PROJECT
ISO/NP 26897
10.20 New project ballot initiated
Jun 28, 2026