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ISO/NP 26897

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating pixel size on digital image of SEM and FIB-SEM

Опште информације

10.20     28. 6. 2026.

ISO

ISO/TC 202/SC 4

Međunarodni standard

Apstrakt

This document specifies a method for calibrating the pixel size and FOV of digital images acquired using an SEM and an FIB-SEM, by employing an appropriate reference material. The applicable range of pixel size and FOV is limited by the structural dimensions available in the reference material used for calibration.

Životni ciklus

TRENUTNO

PROJEKAT
ISO/NP 26897
10.20 Početak izjašnjavanja o predlogu
28. 6. 2026.