Phone: (011) 7541-421, 3409-301, 3409-335, 6547-293, 3409-310
E-mail: Standards sales: prodaja@iss.rs Education: iss-edukacija@iss.rs Information about standards: infocentar@iss.rs
Stevana Brakusa 2, 11030 Beograd
Main menu

SRPS EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)

Dec 30, 2022

General information

60.60     Dec 30, 2022

ISS

C107

European Norm

17.020  

English  

Buying

Published

Language in which you want to receive the document.

Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Life cycle

NOW

PUBLISHED
SRPS EN ISO 23131:2022
60.60 Standard published
Dec 30, 2022

Related project

Adopted from EN ISO 23131:2022

Adopted from ISO 23131:2021 IDENTICAL