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prSRPS EN ISO 23131-1:2026

Ellipsometry — Part 1: Principles

General information

10.99     Sep 18, 2026

ISS

C107

European Norm

English  

Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Life cycle

PREVIOUSLY

PUBLISHED
SRPS EN ISO 23131:2022

NOW

PROJECT
prSRPS EN ISO 23131-1:2026
10.99 New project approved
Sep 18, 2026

Related project

Adopted from prEN ISO 23131-1 IDENTICAL

Adopted from ISO/AWI 23131-1 IDENTICAL