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SRPS EN 62047-1:2008

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Jun 19, 2008
95.99   Withdrawal of Standard   Mar 24, 2020

General information

95.99     Mar 24, 2020

ISS

N022

European Norm

31.080.99  

English  

povučen - sednica 2020-03-13

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Scope

This part of EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.

Life cycle

NOW

WITHDRAWN
SRPS EN 62047-1:2008
95.99 Withdrawal of Standard
Mar 24, 2020

REVISED BY

PUBLISHED
SRPS EN 62047-1:2016

Related project

Adopted from EN 62047-1:2006