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SRPS EN 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

Jul 28, 2016

General information

60.60     Jul 28, 2016

ISS

N022

European Norm

31.080.99  

English  

sednica 2016-05-27

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Scope

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:

a) removal of ten terms;

b) revision of twelve terms;

c) addition of sixteen new terms.

Life cycle

PREVIOUSLY

WITHDRAWN
SRPS EN 62047-1:2008

NOW

PUBLISHED
SRPS EN 62047-1:2016
60.60 Standard published
Jul 28, 2016

Related project

Adopted from EN 62047-1:2016