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SRPS C.A3.041:2012

Standard Practice for Scanning Electron Microscope Beam Size Characterization

Jan 30, 2012

General information

60.60     Jan 30, 2012

ISS

C017-2

31.120     37.020  

English  

From plan 2011; IDT ASTM E986-04 (2010)

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Scope

This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized.

Life cycle

NOW

PUBLISHED
SRPS C.A3.041:2012
60.60 Standard published
Jan 30, 2012

Related project

Adopted from ASTM E986-04 (2010)