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ISO 18114:2021

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

May 11, 2021

General information

90.20     Apr 15, 2026

ISO

ISO/TC 201/SC 6

International Standard

71.040.40  

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Scope

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Life cycle

PREVIOUSLY

WITHDRAWN
ISO 18114:2003

NOW

PUBLISHED
ISO 18114:2021
90.20 Standard under periodical review
Apr 15, 2026

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