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ISO 18114:2021

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
11. 5. 2021.

Опште информације

90.20     15. 4. 2026.

ISO

ISO/TC 201/SC 6

Međunarodni standard

71.040.40  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Životni ciklus

PRETHODNO

POVUČEN
ISO 18114:2003

TRENUTNO

OBJAVLJEN
ISO 18114:2021
90.20 Početak postupka preispitivanja standarda
15. 4. 2026.

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