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ISO/AWI 23131-1

Ellipsometry — Part 1: Principles

General information

20.00     Sep 12, 2026

ISO

ISO/TC 107

International Standard

Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Life cycle

PREVIOUSLY

PUBLISHED
ISO 23131:2021

NOW

PROJECT
ISO/AWI 23131-1
20.00 New project registered in TC/SC work programme
Sep 12, 2026

National adoptions

Ellipsometry — Part 1: Principles

10.99   New project approved

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