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ISO/AWI 23131-1

Ellipsometry — Part 1: Principles

Опште информације

20.00     12. 9. 2026.

ISO

ISO/TC 107

Međunarodni standard

Apstrakt

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Životni ciklus

PRETHODNO

OBJAVLJEN
ISO 23131:2021

TRENUTNO

PROJEKAT
ISO/AWI 23131-1
20.00 Novi projekat upisuje se u plan rada komisije za standarde
12. 9. 2026.

Nacionalna preuzimanja

prSRPS EN ISO 23131-1:2026  
ISS

Elipsometrija – Deo 1: Principi

10.99   Novi projekat se prihvata

C107 Saznaj više