Phone: (011) 7541-421, 3409-301, 3409-335, 6547-293, 3409-310
E-mail: Standards sales: prodaja@iss.rs Education: iss-edukacija@iss.rs Information about standards: infocentar@iss.rs Certification body: sertifikaciono.telo@iss.rs
Stevana Brakusa 2, 11030 Beograd
Main menu

ISO/AWI 22278

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

General information

10.99     Oct 20, 2026

ISO

ISO/TC 206

International Standard

Scope

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

Life cycle

PREVIOUSLY

PUBLISHED
ISO 22278:2020

NOW

PROJECT
ISO/AWI 22278
10.99 New project approved
Oct 20, 2026