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Glavni meni

ISO/AWI 22278

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Опште информације

10.99     20. 10. 2026.

ISO

ISO/TC 206

Međunarodni standard

Apstrakt

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

Životni ciklus

PRETHODNO

OBJAVLJEN
ISO 22278:2020

TRENUTNO

PROJEKAT
ISO/AWI 22278
10.99 Novi projekat se prihvata
20. 10. 2026.