This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
WITHDRAWN
SRPS EN ISO 25178-603:2014
PUBLISHED
SRPS EN ISO 25178-603:2025
60.60
Standard published
Apr 30, 2025