IEC 63567-1 ED1
Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle
General information
40.20
Dec 19, 2025
PRVC
Mar 13, 2026
IEC
TC 47
International Standard
31.080.99
Buying
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Life cycle
NOW
PROJECT
IEC 63567-1 ED1
40.20
DIS ballot initiated: 12 weeks
Dec 19, 2025
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