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IEC 63567-1 ED1

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

40.20     Dec 19, 2025

PRVC    Mar 13, 2026

IEC

TC 47

International Standard

31.080.99  

Buying

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Life cycle

NOW

PROJECT
IEC 63567-1 ED1
40.20 DIS ballot initiated: 12 weeks
Dec 19, 2025

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