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naSRPS EN IEC 63567-1:2026

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 1: Transmittance evaluation method of EUV pellicle

General information

40.60     Mar 13, 2026

ISS

N022

European Norm

31.080.99  

English  

Life cycle

NOW

PROJECT
naSRPS EN IEC 63567-1:2026
40.60 Close of voting
Mar 13, 2026

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