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Glavni meni

IEC TR 63258:2021 ED1

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
19. 3. 2021.

Опште информације

60.60     19. 3. 2021.

IEC

TC 113

Tehnički izveštaj

07.120  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

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TRENUTNO

OBJAVLJEN
IEC TR 63258:2021 ED1
60.60 Standard objavljen
19. 3. 2021.