IEC TS 62607-6-23:2025 ED1

Nanomanufacturing - Key control characteristics - Part 6-23: Graphene-related products - Sheet resistance, carrier density, carrier mobility: Hall bar method

Apstrakt

IEC TS 62607-6-23:2025, which is a Technical Specification, establishes a standardized method to determine the key control characteristic (KCC):
• carrier mobility and sheet resistance
for graphene thin films by:
• Hall measurement.
The carrier mobility is derived by the product of the Hall coefficient and the electric conductivity and the sheet resistance is derived by the product of the longitudinal resistance and the aspect ratio of a Hall device.
• The method is applicable for graphene thin film Hall devices with length and width greater than 100 micrometers.
The document is developed to complete the fabrication and measurement of devices using cost-effective processes and equipment. Due to the high cost and low cost-performance ratio of photolithography processes and equipment, this document does not utilize photolithography processes and equipment.