IEC TS 62876-3-2 ED1

Nanomanufacturing – Reliability and durability assessment - Part 3-2: Graphene - Ellipsometry measurement of graphene

Apstrakt

IEC TS 62876-3-2:2026 which is a Technical Specification, establishes a standardized method to determine
• volume fraction
for graphene by
• ellipsometry.

Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non‑destructive, it can be used to assess the reliability and durability of graphene films on production lines.
• For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated.
• Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed.
• This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.