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IEC 62047-2:2006 ED1

Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
15. 8. 2006.

Опште информације

60.60     15. 8. 2006.

IEC

TC 47/SC 47F

Međunarodni standard

31.080.99  

engleski   francuski  

Kupovina

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Apstrakt

Specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices. The main structural materials for MEMS, micromachines and similar devices have special features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography. This International Standard specifies the testing method, which enables a guarantee of accuracy corresponding to the special features.

Životni ciklus

TRENUTNO

OBJAVLJEN
IEC 62047-2:2006 ED1
60.60 Standard objavljen
15. 8. 2006.