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IEC 62047-30:2017 ED1

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
15. 9. 2017.

Опште информације

60.60     15. 9. 2017.

IEC

TC 47/SC 47F

Međunarodni standard

31.080.99     31.140  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process

Životni ciklus

TRENUTNO

OBJAVLJEN
IEC 62047-30:2017 ED1
60.60 Standard objavljen
15. 9. 2017.