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ISO 20341:2003

Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
24. 7. 2003.

Опште информације

90.93     15. 7. 2025.

ISO

ISO/TC 201/SC 6

Međunarodni standard

71.040.40  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

Životni ciklus

TRENUTNO

OBJAVLJEN
ISO 20341:2003
90.93 Odluka o potvrđivanju standarda
15. 7. 2025.