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Glavni meni

ISO 23216:2021

Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
4. 5. 2021.

Опште информације

90.20     15. 4. 2026.

ISO

ISO/TC 107

Međunarodni standard

25.220.99  

engleski   francuski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Životni ciklus

TRENUTNO

OBJAVLJEN
ISO 23216:2021
90.20 Početak postupka preispitivanja standarda
15. 4. 2026.

Nacionalna preuzimanja

Filmovi na bazi ugljenika – Određivanje optičkih svojstava amorfnih filmova od ugljenika pomoću spektroskopske elipsometrije

60.60   Standard objavljen

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