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ISO 18115-3:2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
30. 6. 2022.

Опште информације

60.60     30. 6. 2022.

ISO

ISO/TC 201/SC 1

Međunarodni standard

01.040.71     71.040.40  

engleski  

Kupovina

Objavljen

Jezik na kome želite da primite dokument.

Apstrakt

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

Životni ciklus

TRENUTNO

OBJAVLJEN
ISO 18115-3:2022
60.60 Standard objavljen
30. 6. 2022.