ISO/CD TS 25739

Surface chemical analysis — Electron spectroscopies — Work function measurement by ultraviolet photoelectron spectroscopy

Apstrakt

This Technical Specification offers a measurement procedure of the work function (WF) using ultraviolet photoelectron spectroscopy (UPS). The procedure involves the selection of an appropriate spectrometer for WF measurement, calibration of the UPS energy scale, optimization of sample bias, determination of the secondary electron cutoff, and consideration of associated uncertainties. This WF measurement is applicable to solid samples that are both electrically conductive and flat across the observed area, including examples such as a gold (Au) film on a silicon wafer and highly-oriented pyrolytic graphite (HOPG).