IEC 62047-44:2024 ED1

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Datum objavljivanja: 22. 2. 2024.

Опште информације

Trenutna faza: 60.60 Effective date: 22. 2. 2024.

Inicijator: IEC

Pripada: TC 47/SC 47F

Vrsta: Međunarodni standard

ICS: 31.080.99

Jezik: engleski

Kupovina

Status: Objavljen

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Apstrakt

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric‑field‑sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric‑field‑sensitive devices. The statements made in this document are also applicable to MEMS resonant electric‑field‑sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.

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TRENUTNO

OBJAVLJEN
IEC 62047-44:2024 ED1
60.60 Standard objavljen
22. 2. 2024.